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Simulation solution for micro droplet impingementon a flat dry surface
Authors:Sun Zhen-Hai and Han Rui-Jing
Affiliation:Grace Semiconductor Manufacture Corporation, Shanghai201203, China; Shanghai Institute of Microsystem andInformation Technology, Chinese Academy of Sciences, Shanghai 200050,China;Grace Semiconductor Manufacture Corporation, Shanghai201203, China;Graduate School of Chinese Academy of Sciences, Beijing100039, China
Abstract:This paper presents a computational fluid dynamics approach formicro droplet impacting on a flat dry surface. A two-phase flowapproach is employed using FLUENT VOF multiphase model to calculatethe flow distributions upon impact. The contact line velocity istracked to calculate the dynamic contact angle through user definedfunction program. The study showed that the treatment of contactline velocity is crucial for the accurate prediction of dropletimpacting on poor wettability surfaces. On the other hand, it hasmuch less influence on the simulation of droplet impacting on goodwettability surfaces. Good fit between simulation results andexperimental data is obtained using this model.
Keywords:droplet impact   wettability  contact line velocity   dynamic contact angle
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