Waveguide technique for measuring thin film parameters |
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| Authors: | A V Khomchenko A B Sotsky A A Romanenko E V Glazunov A V Shulga |
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| Institution: | (1) Institute of Applied Optics, National Academy of Sciences of Belarus, Mogilev, 212793, Belarus |
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| Abstract: | A waveguide technique for measuring the absorption coefficient, refractive index, and thickness of thin films is suggested.
It is based on taking the angular dependence of the light beam reflection coefficient in an optical scheme involving a prism
coupler. Application of the technique to determining the parameters of thin-film waveguides, insulating coatings, and metal
films is considered. |
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