| Ba(Zr0.3Ti0.7)O3 铁电薄膜的制备 |
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| 引用本文： | 张红燕,翟继卫,张军.Ba(Zr0.3Ti0.7)O3 铁电薄膜的制备[J].新疆大学学报(理工版),2006,23(2):182-184. |
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| 作者姓名： | 张红燕 翟继卫 张军 |
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| 作者单位： | 新疆大学物理系 新疆乌鲁木齐830046(张红燕，张军)，同济大学功能材料研究所 上海200092(翟继卫) |
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| 摘 要： | 介绍了用溶胶-凝胶法(sol-gel)在Pt/Ti/SiO2/Si衬底和石英衬底上制备Ba(Zr0.3Ti0.7)O3铁电薄膜的基本原理、工艺过程及工艺特点;Sol-gel制备的Ba(Zr0.3Ti0.7)O3铁电薄膜表面平整、厚度均匀.
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| 关 键 词： | 溶胶-凝胶法 铁电薄膜 Ba(Zr03Ti07)O3 |
| 文章编号： | 1000-2839（2006）02-0182-03 |
| 收稿时间： | 2005-11-29 |
| 修稿时间： | 2005年11月29 |
Technology of Preparing Ba(Zr0.3Ti0.7)O3 Ferroelectric Thin Film |
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| ZHANG Hong-yan,ZHAI Ji-wei,ZHANG Jun.Technology of Preparing Ba(Zr0.3Ti0.7)O3 Ferroelectric Thin Film[J].Journal of Xinjiang University(Science & Engineering),2006,23(2):182-184. |
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| Authors: | ZHANG Hong-yan ZHAI Ji-wei ZHANG Jun |
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| Institution: | 1. Departent of Physics,Xinjiang University,Urumqi ,Xingjiang 830046 ,China 2. Functional Materials Reasearch Laboratory, Tongji University, Shanghai 200092, China |
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| Abstract: | The essential principle, technology process and advantages of the Ba(Zr-{0.3}Ti-{0.7})O-3 (BZT) ferroelectric thin films have been grown on Pt/Ti/SiO-2/Si substrates and quartz substrates, which prepared by sol-gel processing are introduced. BZT thin films show smooth surface morphology and well distributed thickness. |
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| Keywords: | Sol-Gel process ferroelectric thin films Ba(Zr-{0 3}Ti-{0 7})O-3 |
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