Pressure dependence of secondary ion emission from selected 3d, 4d, and 5d transition metals under N2O, NO, and NO2

The reactant gas pressure dependence of secondary ion emission from surfaces of polycrystalline Cr, Fe, Co, Mo, Rh, W, Re, and Ir under the action of N₂O, NO and NO₂ was observed by means of moderate dynamic SIMS. The mass spectra for constant reactant gas pressure indicate the existence of two different groups of transition metals showing either dissociative or partial molecular adsorption behavior. This is confirmed at least above some suitable reactant gas pressure. Besides some special details (Fe/NO; Co/NO) several of the relative secondary ion intensities vs. reactant gas pressure exhibit similar curvature as for O₂, thus indicating the NO_x gases to be modified sources of oxygen. At higher pressures molecular secondary ions with and without metal atoms come to be appreciable. Received: 28 May 1997 / Revised: 2 February 1998 / Accepted: 4 February 1998