Applications of synchrotron radiation in materials analysis |
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Authors: | Bruno Lengeler |
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Institution: | (1) Siemens AG, Zentralbereich Forschung und Technik, Mikroelektronik-Technologiezentrum, Otto-Hahn-Ring 6, D-8000 München, Federal Republic of Germany |
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Abstract: | The synchrotron radiation (SR) emitted by circulating high-energy electrons has extraordinary properties: The light is intensive and bright, it is tunable and highly collimated, and finally, it is linearly polarized. These exceptional properties have initiated a unique revival of many spectroscopies using electromagnetic radiation. The techniques of special concern for materials analysis which are treated in this article are: X-ray absorption, reflection, fluorescence, diffraction and topography. A number of examples will be given in order to illustrate the possibilities of these techniques when SR is used.On leave of absence from Institut für Festkörperforschung, KFA Jülich, D-5170 Jülich, Federal Republic of Germany |
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Keywords: | synchrotron radiation X-ray absorption reflection fluorescence |
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