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Applications of synchrotron radiation in materials analysis
Authors:Bruno Lengeler
Institution:(1) Siemens AG, Zentralbereich Forschung und Technik, Mikroelektronik-Technologiezentrum, Otto-Hahn-Ring 6, D-8000 München, Federal Republic of Germany
Abstract:The synchrotron radiation (SR) emitted by circulating high-energy electrons has extraordinary properties: The light is intensive and bright, it is tunable and highly collimated, and finally, it is linearly polarized. These exceptional properties have initiated a unique revival of many spectroscopies using electromagnetic radiation. The techniques of special concern for materials analysis which are treated in this article are: X-ray absorption, reflection, fluorescence, diffraction and topography. A number of examples will be given in order to illustrate the possibilities of these techniques when SR is used.On leave of absence from Institut für Festkörperforschung, KFA Jülich, D-5170 Jülich, Federal Republic of Germany
Keywords:synchrotron radiation  X-ray absorption  reflection  fluorescence
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