Imprinting by hot embossing in polymer substrates using a template of silica glass surface-structured by the ablation of LIBWE method

Laser-induced backside wet etching (LIBWE) of silica glass plates was performed to fabricate an imprinting template for hot embossing in polymer substrates such as polystyrene and silicone resin. Well-defined inverse surface-micropatterns of gratings and grid arrays on the substrates were produced by the hot embossing using a surface-structured silica glass as the template. These results indicate that the LIBWE method allows us to generate robust glass molding tools that exhibit the inverse shapes of the intended microstructures. PACS 52.38.Mf; 68.47.Mn; 81.05.Kf; 81.05.Lg; 83.50.Uv