基底微缺陷对介质薄膜光学性能影响的理论研究

基于非均匀膜理论提出一种存在微缺陷的介质基底的折射率分层模型，将基底依次分为表面层、亚表面层和体材料层，其中表面层和亚面层分别等效为折射率服从统计分布的非均匀膜，将它们分别再次细分为N₁和N₂个子层，每一子层均视为均匀介质 膜.应用光学薄膜特征矩阵法对其进行理论分析，并对单层介质膜的光学性能进行数值计算. 研究结果表明：基底的表面和亚表面微缺陷改变了薄膜和基底的等效折射率，导致了准Brew ster角和组合反射率与理想情形的偏离.同时这些微缺陷也改变了光在薄膜和基底中的传播 特性，因此反射相移和相位差均偏离理想情形.在研究基底的微缺陷对多层介质膜光学性能 影响的分析和计算时，该模型同样适用. 关键词： 微缺陷 介质薄膜 非均匀膜 光学性能

Theoretical study of influence of substrate microdefects on optical properties of dielectric thin films

Based on the theory of inhomogeneous thin films, a model for refractive index of stratified dielectric substrate is firstly put forward. The substrate can be divided into surface layer, subsurface layer and bulk layer in turn. Both the s urface layer and subsurface layer, whose refractive indices obey statistical dis tributions, are equivalent to inhomogeneous thin films. They can be separated in to N₁ and N₂ sublayers respetively which are regarded as homogenous thin films. Subsequently, theoretical analysis was carried out utili zing the characteristic matrix method of optical thin films. Numerical calculati on for optical properties of single layer dielectric thin films was carried out. The computing results indicate that microdefects in surface layer and subsurfac e layer of the substrate alter the equivalent refractive indices of the thin film and the substrate, which leads to the deviation of pseudo-Brewster angles and assembling reflectance from ideal conditions. Meanwhile, these microdefects change the propagation characteristics in thin film and substrate, as a result t he phase shift of reflection and phase difference deviate from ideal conditions. In addition, this model is also suitable for calculating the influence of micr odefects in the substrate on optical propertied of multilayer dielectric thin fi lms.