Three-dimensional integration of microoptical components buried inside photosensitive glass by femtosecond laser direct writing |
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Authors: | Zhongke Wang Koji Sugioka Katsumi Midorikawa |
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Institution: | (1) Laser Technology Laboratory, RIKEN – The Institute of Physical and Chemical Research, Hirosawa 2-1, Wako, Saitama 351-0198, Japan |
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Abstract: | We report the three-dimensional (3D) integration of microoptical components such as microlenses, micromirrors and optical
waveguides in a single glass chip by femtosecond (fs) laser direct writing. First, two types of microoptical lenses were fabricated
inside photosensitive Foturan glass by forming hollow microstructures using fs laser direct writing followed by thermal treatment,
successive wet etching and additional annealing. One type of lens is the cylindrical microlens with a curvature radius R of
1.0 mm, and the other is the plano-convex microlens with radius R of 0.75 mm. Subsequently, by the continuous procedure of
hollow microstructure fabrication, a micromirror was integrated with the plano-convex microlens in the single glass chip.
Further integration of waveguides was performed by internal refractive index modification using fs laser direct writing after
the hollow structure fabrication of the microlens and the micromirror. A demonstration of the laser beam transmission in the
integrated optical microdevice shows that the 3D integration of waveguides with a micromirror and a microoptical lens in a
single glass chip is highly effective for light beam guiding and focusing.
PACS 42.62.-b; 81.05.Kf; 42.82.Cr; 82.50.Pt; 42.79.Gn |
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