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Influence of background pressure on the microstructure and optical properties of Mo/Si multilayers fabricated by magnetron sputtering |
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| Authors: | LV Peng ZHANG ZaiQiang GUAN JinTong WANG XiaoDong HOU XiuLi ZHANG LingYan WANG JiJun CHEN Bo & GUAN QingFeng |
| Affiliation: | 1 School of Materials Science & Engineering,Jiangsu University,Zhenjiang 212013,China;2 Faculty of Science,Jiangsu University,Zhenjiang 212013,China;3 State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China |
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