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Evaluation of dislocation energy in thin films |
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| Authors: | RA Coppeta D Holec H Ceric T Grasser |
| Institution: | 1. Institute for Microelectronics, Technische Universit?t Wien, A-1040 Wien, Austria.coppeta@iue.tuwien.ac.at;3. Department of Physical Metallurgy and Materials Testing, Montanuniversit?t Leoben, A-8700 Leoben, Austria.;4. Christian Doppler Laboratory for Reliability Issues in Microelectronics at the Institute for Microelectronics, Technische Universit?t Wien, A-1040 Wien, Austria.;5. Institute for Microelectronics, Technische Universit?t Wien, A-1040 Wien, Austria. |
| Abstract: | |
| Keywords: | dislocations critical thickness heterostructure |