| Abstract: | A micro test pattern prepared by focused ion beam milling was used to evaluate the three‐dimensional resolution of a microtomograph at the BL20B2 beamline of SPring‐8. The resolutions along the direction within the tomographic slice plane and perpendicular to it were determined from the modulation transfer functions. The through‐plane resolution perpendicular to the tomographic slice was evaluated to be 8 µm, which corresponds to the spatial resolution of two‐dimensional radiographs. In contrast, the in‐plane resolution within the slice was evaluated to be 12 µm. Real‐space interpolation was performed prior to the tomographic reconstruction, giving an improved in‐plane resolution of 8.5 µm. However, the 8 µm pitch pattern was resolved in the interpolated slice image. To reflect this result, another resolution measure from the peak‐to‐valley difference plot was introduced. This resolution measure gave resolution limits of 7.4 µm for the in‐plane direction and 6.1 µm for the through‐plane direction. The three‐dimensional test pattern along with the interpolated reconstruction enables the quantitative evaluation of the spatial resolution of microtomographs. |
