Study of the plasmas produced during the deposition of TiC/SiC thin films in a hybrid magnetron-laser system |
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Authors: | M Novotný J Bulíř J Lančok M Jelínek Z Zelinger |
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Institution: | (1) Institute of Physics, Acad. Sci. CR, Na Slovance 2, 182 21 Praha 8, Czech Republic;(2) J. Heyrovsky Institute of Physical Chemistry, Acad. Sci. CR, Dolejškova 3, 182 23 Praha 8, Czech Republic |
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Abstract: | Time- and spatially-resolved optical emission spectroscopy was performed to characterize the plasma produced in a hybrid magnetron-sputtering-laser
deposition system, which is used for TiC or SiC thin films preparation. A graphite target was ablated by a KrF excimer laser
(λ=248 nm,τ=20 ns) and either Ti or Si targets were used for DC magnetron sputtering in argon ambient. Spectra were measured in the range
250–850 nm. The evolution of the spectra with varying magnetron powers (0–100 W) and argon pressures (0.3–10 Pa) was studied.
Spectra of the plasmas produced by a) the magnetron alone, b) the ablation laser alone, and c) the magnetron and the ablation
laser together, were recorded. Spectra (a) were dominated by Ar atoms and Ar+ ions. Emission lines of Ti and Si were detected, when Ti target and Si target was used, respectively. Spectra (b) revealed
emission of C, C+, C2, Ar, Ar+. Spectra (c) showed presence of all previously mentioned species and further of Ti+ ions emission was detected.
The research was supported by Grant Agency of the Czech Republic No. 202/06/02161, GA ASCR project number A1010110/01 and
Institutional Research Plan AV CR No. AV0Z 10100522. |
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Keywords: | 52 38 Mf 52 70 -m |
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