Infrared reflection spectra in contactless nondestructive measurements of the electron density and mobility in indium phosphide

On the basis of numerical calculations and experimental studies we analyze the possibilities of measuring the electrophysical parameters of indium phosphide by means of infrared reflection spectra at wavelengths ranging from 5 to 200 m. We demonstrate that contactless nondestructive measurements of the electron density in the range 10¹⁶–10²⁰ cm^–3 can be made with a relative error not exceeding 15%, and of mobility with a relative error not exceeding 25%. A nomogram method is presented for rapid conversion of data from infrared reflection spectra into the parameters being measured.Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 1, pp. 22–27, January, 1988.