|
|||||
|
|
Experimental evaluation and numerical modeling of adhesion phenomena in polysilicon MEMS |
|
| Authors: | Raffaele Ardito Leonardo Baldasarre Alberto Corigliano Biagio De Masi Attilio Frangi Luca Magagnin |
| Affiliation: | 1. Department of Civil and Environmental Engineering, Politecnico di Milano, Piazza Leonardo da Vinci 32, 20133, Milano, Italy 2. Department of Chemistry, Materials and Chemical Engineering, Politecnico di Milano, Via Mancinelli, 7, 20131, Milano, Italy |
| Abstract: | |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ | |