| A piezoresistive micro-cantilever for thermal infrared detector |
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| 作者姓名： | 梁晋涛 刘君华 李昕 朱长纯 |
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| 作者单位： | School of Electrical Engineering Xi'an Jiaotong University，Xi'an 710049，School of Electrical Engineering，Xi'an Jiaotong University，Xi'an 710049，School of Electronics and Information Engineering，Xi'an Jiaotong University，Xi'an 710049，School of Electronics and Information Engineering，Xi'an Jiaotong University，Xi'an 710049 |
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| 基金项目： | This work was jointly supported by the National Natural Science Foundation of China under Grant No.60276037. |
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| 摘 要： | A novel tri-layer Si-based micro-cantilever thermal infrared (IR) detector with carbon nanotube (CNT) film is fabricated. It is based on the characteristic that the composite micro-cantilever bends in response to incident IR thermal radiation due to the bi-material effect. The bending of micro-cantilever is piezoresistively detected. Furthermore, a new IR absorbing layer material-CNTs-is coated in order to enhance IR radiation absorbing characteristic, the micro-electro-mechanical system (MEMS) sensor could be compatible with integrated circuit technology.
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