| 原子束计算全息片的设计与制作研究 |
| |
| 引用本文： | 石建平,陈旭南,陈献忠,高洪涛,陈元培.原子束计算全息片的设计与制作研究[J].光子学报,2003,32(5):598-600. |
| |
| 作者姓名： | 石建平 陈旭南 陈献忠 高洪涛 陈元培 |
| |
| 作者单位： | 中国科学院光电技术研究所微细加工国家重点实验室,成都,610209 |
| |
| 基金项目： | 中国科学院“知识创新工程”项目资助 (A2K0 0 0 9) |
| |
| 摘 要： | 在分析原子束计算全息片特点的基础上,提出采用罗曼Ⅲ型傅里叶变换计算全息图设计原子束计算全息片,给出设计步骤,然后提出采用电子束光刻编码矩孔图形,ICP各向异性刻蚀SiN薄膜的全息片制作方案,对全息片的制作工艺流程详细予以介绍,最后给出制作完成的SiN薄膜计算全息片.
|
| 关 键 词： | 原子束计算全息片 罗曼Ⅲ型编码 SiN薄膜 纳米任意图形制作 |
| 收稿时间： | 2002/9/17 |
| 修稿时间： | 2002年9月17日 |
The Design and Fabricate of the Computer Generated Hologram for Atoms |
| |
| Shi Jianping,Chen Xunan,Chen Xianzhong,Gao Hongtao,Chen YuanpeiState Key Laboratory of Optical Technologies for Microfabrication.The Design and Fabricate of the Computer Generated Hologram for Atoms[J].Acta Photonica Sinica,2003,32(5):598-600. |
| |
| Authors: | Shi Jianping Chen Xunan Chen Xianzhong Gao Hongtao Chen YuanpeiState Key Laboratory of Optical Technologies for Microfabrication |
| |
| Institution: | Shi Jianping,Chen Xunan,Chen Xianzhong,Gao Hongtao,Chen YuanpeiState Key Laboratory of Optical Technologies for Microfabrication,Institute of Optical &Electronic Technology,Chinese Academy of Science,Chengdu 610209,China |
| |
| Abstract: | Based on analyzing the specialty of the CGH for atoms the design scheme is presented with the Lohmann Ⅲ coding Fourier transform CGH. To fabricate the CGH, the electronic beam lithography is used to exposure the rectangle holes on the SiN film firstly, and then the ICP is used to etch the holes anisotropically The technological process is discussed in detail and in the end a photograph of SiN film CGH is shown. |
| |
| Keywords: | CGH for atoms Lohmann Ⅲ coding SiN film Any nano-pattern fabricate |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
| 点击此处可从《光子学报》浏览原始摘要信息 |
| 点击此处可从《光子学报》下载免费的PDF全文 |
|
