Enhancement of cavitation activity and particle removal with pulsed high frequency ultrasound and supersaturation

Megasonic cleaning as applied in leading edge semiconductor device manufacturing strongly relies on the phenomenon of acoustic cavitation. As the occurrence of acoustic cavitation is incorporating a multitude of interdependent effects, the amount of cavitation activity in the cleaning liquid strongly depends on the sonication conditions. It is shown that cavitation activity as measured by means of ultraharmonic cavitation noise can be significantly enhanced when pulsed sonication is applied to a gas supersaturated liquid under traveling wave conditions. It is demonstrated that this enhancement coincides with a dramatic increase in particle removal and is therefore of great interest for megasonic cleaning applications. It is demonstrated that the optimal pulse parameters are determined by the dissolution time of the active bubbles, whereas the amount of cavitation activity depends on the ratio between pulse-off and pulse-on time as well as the applied acoustic power. The optimal pulse-off time is independent of the corresponding pulse-on time but increases significantly with increasing gas concentration. We show that on the other hand, supersaturation is needed to enable acoustic cavitation at aforementioned conditions, but has to be kept below values, for which active bubbles cannot dissolve anymore and are therefore lost during subsequent pulses. For the applicable range of gas contents between 100% and 130% saturation, the optimal pulse-off time reaches values between 150 and 340 ms, respectively. Full particle removal of 78 nm-diameter silica particles at a power density of 0.67 W/cm² is obtained for the optimal pulse-off times. The optimal pulse-off time values are derived from the dissolution time of bubbles with a radius of 3.3 μm and verified experimentally. The bubble radius used in the calculations corresponds to the linear resonance size in a 928 kHz sound field, which demonstrates that the recycling of active bubbles is the main enhancement mechanism. The optimal choice of the pulsing conditions however is constrained by the trade-off between the effective sonication time and the desire to have a sufficient amount of active bubbles at lower powers, which might be necessary if very delicate structures have to be cleaned.