Preparation of thin stable erbium target sandwiched between carbon layers

Targets of isotopically enriched ¹⁷⁰Er (erbium) were prepared on 45 μg/cm² carbon backing using the method of vacuum evaporation. Another layer of carbon with thickness 23 μg/cm² was deposited on it as a protective cap with the help of an electron gun. Carbon backing, Er and the capping carbon layer were deposited using resistive heating and electron gun deposition without disturbing the vacuum. The thickness of ¹⁷⁰Er was measured by X-ray fluorescence analysis as well as with Rutherford backscattering spectrometry and it was found to be 150 μg/cm². Successful preparation of sandwiched targets was very sensitive to substrate temperature, deposition rate, duration of in situ annealing, cooling rate etc.