利用去湿现象制备图案化的离子刻蚀聚合物保护层

微米和纳米尺度的图案化表面的制备在微电子、光学、生物、化学和材料科学等领域具有重要的科学意义和应用价值 [1～ 3 ] .由于需要复杂昂贵的设备和苛刻的工作环境 ,光刻技术难以广泛应用于微电子以外的领域 ,因此 ,发展简单、便宜、适用于普通实验室 (尤其是化学实验室 )的表面图案化技术已成为一个涉及众多学科领域的课题 .在近年来不断涌现出来的物理、化学和生物的表面图案化技术 [4～ 6]中 ,最具代表性的是由 Whitesides等 [7]发明的以表面具有微观图案的聚二甲基硅氧烷 (PDMS)弹性体作为模具或印章的软光刻技术 .结合溶胶 -凝胶、…

Fabrication of Patterned Polymer Resists for Ion Etching by Using Dewetting

A novel method using a combination of microcontact printing(μCP) technique, surface-directed condensation and surface- directed dewetting has been developed to fabricate patterned polymer films on gold substrates. These patterned polymer films can serve as resists in the argon ion etching effectively to transfer patterns into the underlying gold substrates. This method is flexible in controlling the shape and feature size of the patterns in the polymer resists by simply adjusting the concentration of polymer solution, and especially it also provides a route to sub-micrometer sized features by using an original template with micrometer sized features.