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New two-step growth of microcrystalline silicon thin films without incubation layer |
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| Authors: | Hongyun Yue Aimin Wu Xueyu Zhang Tingju Li |
| Affiliation: | a School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China;b Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Ministry of Education, Dalian 116024, China |
| Abstract: | |
| Keywords: | A1. Crystal structure A1. Etching A3. Chemical vapor deposition processes A3. Two-step growth B2. Semiconducting silicon B3. Solar cells |
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