大气压射频氧气放电特性的数值模拟研究

基于漂移扩散近似，对大气压下氧气射频放电产生的等离子体建立了一维流体模型，包括了电子、正离子和负离子的连续性方程、电子能量方程及泊松方程。采用有限差分法对所建立的模型进行了自洽的数值模拟，得到了相应的数值结果。通过对所得数值结果的分析，研究了大气压下氧气放电的基本特性。研究表明，大气压氧气放电中等离子体密度可达到10¹²cm^-3 ,电子温度约在1.23eV，放电中主要的负离子是O^-离子；随着电压峰值的增加，电子密度、电子温度都增加，但n_O-/n_e 的比率先增加到7.5%又后减小到5%，在电压峰值为700V 时达到最大。

Numerical simulation of RF oxygen discharge characteristics at atmospheric pressure

Based on diffuse and drift assumption, a 1-D fluid model of atmospheric pressure oxygen RF discharge was developed. The model includes continuity equations for electrons, positive and negative ions, and energy equation, and Poisson equation for eclectic potential. The finite difference method was adopted to solve the model by numerical simulation. The simulation results show that the electron density and electron temperature were 10¹²cm^-3 and 1.23eV, respectively, and the main negative ion was O^- . As the peak of voltage increased, the electron density and electron temperature increased, however, the ratio of O^-/n_e had a maximum value at 700V.