| VO2热致变色薄膜的结构和光电特性研究 |
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| 引用本文： | 崔敬忠,达道安,姜万顺. VO2热致变色薄膜的结构和光电特性研究[J]. 物理学报, 1998, 47(3): 454-460 |
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| 作者姓名： | 崔敬忠 达道安 姜万顺 |
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| 作者单位： | 中国空间技术研究院兰州物理研究所，兰州 730000 |
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| 摘 要： | 用磁控溅射方法制备了VO2热致变色薄膜.用X射线衍射、X射线光电子谱和原子力显微镜对薄膜的宏观及微观结构进行了分析，表明VO2薄膜纯度高、相结构单一、结晶度好.薄膜的光透过率在2000nm处相变前后改变了42%，高/低温电阻率变化达到三个数量级以上.薄膜的光透过谱和相变过程中电学性质变化的研究与结构分析结果相一致.关键词：
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| 关 键 词： | 光电特性 磁控溅射 二氧化钒 热致变色 薄膜 |
| 收稿时间： | 1997-07-10 |
| 修稿时间： | 1997-09-05 |
STUDY OF STRUCTURAL, ELECTRICAL AND OPTICAL PROPERTIES OF VO2 THERMOCHROMIC THIN FILMS |
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| CUI JING-ZHONG,DA DAO-AN and JIANG WAN-SHUN. STUDY OF STRUCTURAL, ELECTRICAL AND OPTICAL PROPERTIES OF VO2 THERMOCHROMIC THIN FILMS[J]. Acta Physica Sinica, 1998, 47(3): 454-460 |
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| Authors: | CUI JING-ZHONG DA DAO-AN JIANG WAN-SHUN |
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| Abstract: | VO2 thermochromic thin films have been deposited by using the magnetron sputtering method. Both macro, micro and electronic structures of the films have been characterized by X-ray diffraction,X-ray photoelectron spectroscopy and atomic force microscopy. The results show that the films have high purity, monophase and excellent polycrystallinity, which are coincident with the optical and electrical properties. |
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