| 光学纳米测量方法及发展趋势 |
| |
| 引用本文： | 程晓辉,赵洋,李达成.光学纳米测量方法及发展趋势[J].光学技术,1999(3). |
| |
| 作者姓名： | 程晓辉 赵洋 李达成 |
| |
| 作者单位： | 清华大学,精密测试技术及仪器国家重点实验室,北京,100084 |
| |
| 摘 要： | 综述了光学方法中以频率跟踪方法、外差干涉仪、调频干涉仪、偏振干涉仪和光学光栅为代表的光学纳米测量方法。分析了它们的发展状况以及各自特点，指出建立适合于纳米测量的纳米环境是目前亟待解决的关键性问题，给出了光学纳米测量方法的发展方向和在设计测量系统时应该注意的问题
|
| 关 键 词： | 纳米测量 纳米环境 干涉仪 |
Review on optical nanometrology |
| |
| CHENG Xiao-hui,ZHAO Yang,LI Da-cheng.Review on optical nanometrology[J].Optical Technique,1999(3). |
| |
| Authors: | CHENG Xiao-hui ZHAO Yang LI Da-cheng |
| |
| Abstract: | Typical schemes Frequency tracing method, heterodyne interferometer, polarization interferometer, frequency modulation interferometer and optical grating interferometer to achieve nanometrology are presented. Their development and features are analyzed. Nano environment is the key problem in nanometrology and is specially emphasized. The trends of nanometrology using optical methods and problems in system designing are also given. |
| |
| Keywords: | nanometrology nano environment interferometer |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
