| 电子束蒸发TiO2薄膜的光学特性 |
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| 引用本文： | 潘永强,朱昌,弥谦,宋俊杰.电子束蒸发TiO2薄膜的光学特性[J].应用光学,2004,25(5):53-55,50. |
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| 作者姓名： | 潘永强 朱昌 弥谦 宋俊杰 |
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| 作者单位： | 西安工业学院,光电工程学院,陕西,西安,710032 |
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| 摘 要： | 研究了不同工艺参数条件下，电子束蒸发TiO2薄膜的光学特性。在正交实验的基础上，利用离子束辅助沉积技术，获得了影响TiO2薄膜折射率的主要因素．得到了TiO2薄膜的折射率随氧气分压的关系。对离子氧和分子氧两种情况下TiO2薄膜的折射率进行了比较．得到了TiO2薄膜的折射率与沉积速度的关系，并给出了TiO2薄膜的红外吸收光谱。
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| 关 键 词： | 电子束蒸发 TiO2薄膜 折射率 红外吸收光谱 |
| 文章编号： | 1002-2082(2004)05-0053-03 |
The Optical Properties of TiO2 Thin Film Prepared by Electron Beam Evaporation |
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| PAN Yong-qiang,ZHU Chang,Mi Qian,SONG Jun-jie.The Optical Properties of TiO2 Thin Film Prepared by Electron Beam Evaporation[J].Journal of Applied Optics,2004,25(5):53-55,50. |
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| Authors: | PAN Yong-qiang ZHU Chang Mi Qian SONG Jun-jie |
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| Abstract: | The optical properties of TiO_2thin films prepared by electron beam evaporation with different craft parameters are studied. On the base of experiments,the main factors of affecting the refractive index of the TiO_2thin film deposition assisted by ion beam have been found out. Function relation of TiO_2refrative index, oxygen pressure and deposition speed have been gained,besides infrared spectrum.Refractive indices of TiO_2thin films deposited in ioned and molecular oxygen are compared. |
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| Keywords: | electron beam evaporation tianium dioxide thin film refractive index infrared absorption spectrum |
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