A modeling and vibration analysis of a piezoelectric micro-pump diaphragm

The vibration analysis of a micro-pump diaphragm is presented. A piezoelectric micro-pump is studied. For this purpose, a dynamic model of the micro-pump is derived. The micro-pump diaphragm is modeled as circular double membranes, a piezoelectric one as actuator and a silicon one for representing the membrane for pumping action. The damping effect of the fluid is introduced into the equations. Vibration analysis is established by explicitly solving the dynamic model. The natural frequencies and mode shapes are calculated. The orthogonality conditions of the system are discussed. To verify the results, the finite-element micro-pump model is developed in ANSYS software package. The results show that the two methods are well comparable.