X-ray fluorescence method for determining the mass absorption coefficient in two-layer thin-film Ti/Ge and Ni/Ge systems

We propose a new method for determining the mass absorption coefficient in x-ray fluorescence analysis of two-layer thin-film Ti/Ge and Ni/Ge systems using easily made standardized film layers obtained by deposition of titanium or nickel on a polymer film substrate. We calculate correction factors taking into account absorption of primary emission from the x-ray tube and absorption of the analytical line for an element of the bottom layer in the top layer.