Affiliation: | 1. Center for International Research on MicroMechatronics, Institute of Industrial Science, The University of Tokyo, 4‐6‐1 Komaba, Meguro‐ku, Tokyo 153‐8505, Japan, Fax: (+81)?3‐5452‐6250;2. Laboratory for Integrated Micro Mechatronic Systems, LIMMS/CNRS‐IIS, Institute of Industrial Science, The University of Tokyo, 4‐6‐1 Komaba, Meguro‐ku, Tokyo 153‐8505, Japan;3. Department of Intelligent Mechanical Systems Engineering, Faculty of Engineering, Kagawa University, 2217‐20 Hayashi‐cho, Takamatsu 761‐0396, Japan |