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| 异质结材料及其表面金属膜的俄歇能谱研究 | |
| 引用本文： | 严申生,李唯旦,潘慧珍. 异质结材料及其表面金属膜的俄歇能谱研究[J]. 分析测试学报, 1991, 0(2) |
| 作者姓名： | 严申生 李唯旦 潘慧珍 |
| 作者单位： | 上海测试技术研究所(严申生)，中科院上海冶金研究所(李唯旦)，中科院上海冶金研究所(潘慧珍) |
| 摘 要： | 本文阐述主要使用AES研究单层或多层InP/InGaAsP异质结材料的界面,发现晶格失配会引起组分缓变。另外也分析了各种不同温度下的欧姆接触,观察到各金属之间及金属/半导体界面上的相互扩散情况。 |
| 关 键 词： | AES 异质结材料 晶格失配 欧姆接触 |
Research on Heterojunction Material and Metallic Film by AES |
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| Yan Shensheng,Li WeiDan,Pan Huizheng Shanghai Lnstitute of Testing Technology Shanghai Lnstitute of Metallurgy,Academia Sinice. Research on Heterojunction Material and Metallic Film by AES[J]. Journal of Instrumental Analysis, 1991, 0(2) | |
| Authors: | Yan Shensheng Li WeiDan Pan Huizheng Shanghai Lnstitute of Testing Technology Shanghai Lnstitute of Metallurgy Academia Sinice |
| Abstract: | This paper studied mainly the mono-layer or multi-layers lnP/lnGaAsP heterojunction ma-terial interface by AES, and found that the lattiee mismatch led to composition slowchangingMoreover, Ohm contact has been analysed under different temperature, and the diffusion betw-een metals each other as well as metal-semiconductor interfaces was observed. |
| Keywords: | Auger Electron Spectroscopy heterojunction material lattice mismatch ohm coatact |
| 本文献已被 CNKI 等数据库收录！ | |