Influence of thickness on optical properties of titanium layers

Titanium layers with different thicknesses of 21, 83.7, and 133 nm and same other deposition conditions were deposited on glass substrates at 300 K, by physical vapor deposition method under high vacuum conditions. The optical reflectance of the layers was measured in the wave length range of 400–800 nm. The optical properties were calculated by using Kramers-Kronig relations. Relation between the optical properties and nanostructure of the layers was investigated. By using Generalized Gradient Approximations in context of plane wave pseudopotentials (norm conserving and ultrasoft) method, band structure calculated and compared with experimental results.