| 射频功率对PECVD制备类金刚石薄膜光学性能的影响 |
| |
| 引用本文： | 崔万国,张玲.射频功率对PECVD制备类金刚石薄膜光学性能的影响[J].光谱实验室,2010,27(3):937-939. |
| |
| 作者姓名： | 崔万国 张玲 |
| |
| 作者单位： | 厦门大学物理系,福建省厦门市思明南路422号,361005 |
| |
| 摘 要： | 采用射频等离子体增强化学气相沉积(RF-PECVD)法在石英片上生长类金刚石薄膜。通过紫外可见分光光度计、椭偏仪测试手段,研究不同射频功率条件下类金刚石薄膜的光学性能的变化。结果表明,射频功率对类金刚石薄膜的生长具有重要影响,在较低功率下生长的类金刚石薄膜,具有较高的光学透过率和较大的光学带隙。
|
| 关 键 词： | 类金刚石 等离子体增强化学气相沉积 功率 光学性能 |
Effect of RF Power on Optical Property of the Diamond-Like Carbon Film Prepared by RF-PECVD Method |
| |
| CUI Wan-Guo,ZHANG Ling.Effect of RF Power on Optical Property of the Diamond-Like Carbon Film Prepared by RF-PECVD Method[J].Chinese Journal of Spectroscopy Laboratory,2010,27(3):937-939. |
| |
| Authors: | CUI Wan-Guo ZHANG Ling |
| |
| Institution: | CUI Wan-Guo ZHANG Ling(Physics Department of Xiamen University,Xiamen,Fujian 361005,P.R.China) |
| |
| Abstract: | Diamond-like carbon （DLC） film samples were grown on quartz by RF-PECVD.The optical property of DLC was characterized with ultraviolet-visible （UV-Vis） spectroscopy and ellipsometer.The results show that the RF power significantly affects the characteristics of DLC films,The DLC films grown with lower power have better optical transmittance and large optical gap. |
| |
| Keywords: | DLC PECVD Power Optical Property |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
