Adjustable tuning for planar millimeter-wave circuits

At millimeter wavelengths uncontrollable parasitics are of ten large enough to significantly degrade circuit performance when they are not compensated by adjustable elements. It is difficult to add adjustable elements to planar millimeter-wave circuits without increasing their size, weight, and cost. In this paper we investigate three adjustable elements, all involving movement of a short along a section of coplanar waveguide (CPW). These tuners are incorporated in a planar detector circuit for purposes of demonstration and characterization. Their losses are determined. The precision with which they can be adjusted is also considered. Of the three, a tuner based on the laser-assisted etching of molybdenum is shown to have the highest performance at millimeter wavelengths. This tuner employs laser direct write etching¹ with a recently developed photochemical reaction for trimming molybdenum.University of California, Berkeley Berkeley, California 94720M.I.T. Lincoln Laboratory 244 Wood St. Lexington, Massachusetts 0217