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| 掺钼ZnO透明导电薄膜的太赫兹电磁波传输性质 | |
| 引用本文： | 吴臣国,沈杰,李栋,马国宏. 掺钼ZnO透明导电薄膜的太赫兹电磁波传输性质[J]. 物理学报, 2009, 58(12): 8623-8629 |
| 作者姓名： | 吴臣国 沈杰 李栋 马国宏 |
| 作者单位： | (1)复旦大学材料科学系，上海 200433; (2)上海大学物理系，上海 200444 |
| 基金项目： | 上海市应用材料研究与发展基金（批准号：07SA13）、国家自然科学基金（批准号：10774099）、上海市高等学校特聘教授（东方学者）岗位计划（批准号：S30105）和上海市重点学科建设基金（批准号：B113）资助的课题. |
| 摘 要： | 采用直流磁控反应溅射方法，通过调节氧分压在玻璃基底上制备了不同载流子浓度的掺Mo的ZnO（ZMO）透明导电薄膜.应用太赫兹电磁波时域光谱技术研究了ZMO导电膜的太赫兹电磁波透射性质及介电响应，得到了与频率相关的电导率、能量吸收和薄膜折射率，实验结果与经典Drude模型相符很好.ZMO导电膜的太赫兹电磁波脉冲透射性质表明，通过调节ZMO薄膜的载流子浓度，该导电膜可作为应用于衬底和光学器件等太赫兹电磁波频率范围的宽带抗反射涂层.关键词：太赫兹电磁波光谱薄膜电导率宽带抗反射透明导电薄膜 |
| 关 键 词： | 太赫兹电磁波光谱 薄膜电导率 宽带抗反射 透明导电薄膜 |
| 收稿时间： | 2009-04-02 |
Terahertz transmission properties of transparent conducting molybdenum-doped ZnO films |
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| Wu Chen-Guo,Shen Jie,Li Dong,Ma Guo-Hong. Terahertz transmission properties of transparent conducting molybdenum-doped ZnO films[J]. Acta Physica Sinica, 2009, 58(12): 8623-8629 | |
| Authors: | Wu Chen-Guo Shen Jie Li Dong Ma Guo-Hong |
| Abstract: | With direct current reactive magnetron sputtering method, transparent conducting molybdenum-doped ZnO (ZMO) thin films with different carrier concentration on glass substrate were fabricated by monitoring oxygen partial pressure. The dielectric responses of the ZMO films are characterized with terahertz time-domain spectroscopy. Frequency dependent conductivity, power absorption, and refractive index are obtained, and the experimental results can be well reproduced with classic Drude model. Our results reveal that, by adjusting the carrier concentration of ZMO film, the conducting ZMO film can serve as broadband antireflection coatings for substrates and optics in terahertz frequency range. |
| Keywords: | terahertz spectroscopy film conductivity broadband antireflection transparent conducting film |
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