Zn1-xMgxO和Zn1-xMnxO薄膜的制备及其发光性能

采用溶胶-凝胶技术,在Si(110)衬底上制备了Mg、Mn掺杂外延生长的Zn_1-xMg_xO和Zn_1-xMn_xO薄膜,通过XRD、AFM、PL等考察不同杂质浓度对薄膜结晶质量和发光性能的影响。结果表明:Zn_1-xMg_xO和Zn_1-xMn_xO薄膜均具有较高的T_c(002)结构系数和较为光滑、平整的表面形貌。掺杂使得薄膜的紫外发光峰向短波方向移动至365 nm左右,同时Zn_1-xMn_xO薄膜的室温可见光发射得以有效地钝化,使其近带边紫外光发射与深能级可见光发射比例高达56,极大地提高了薄膜紫外发光性能。并对掺杂薄膜紫外发光蓝移和Zn_1-xMn_xO薄膜室温可见光发射的猝灭机理进行了深入探讨,得出掺杂组分为Zn_0.85Mg_0.15O、Zn_0.97Mn_0.03O时,薄膜具有最强的紫外光发射性能。

The Preparation and Optical Properties of Zn_(1-x)Mg_xO and Zn_(1-x)Mn_xO Thin Films by Sol-gel Process

Zinc oxide (ZnO) semiconductor with a large exciton binding energy of 60 meV and a direct-band gap of 3.37 eV has attracted tremendous attention in recent years because of its high potential for applications,such as short wavelength optical devices,photonic devices and laser systems etc. Especially,the optical pro-perties of ZnO can be obviously influenced by impurity doping with different concentrations,so several techniques,such as pulsed laser deposition,reactive thermal evaporation and sol-gel process,h...