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应用于空间惯性传感器的压电驱动器的性能测试
引用本文:李华东,齐克奇,石强,王少鑫,王智.应用于空间惯性传感器的压电驱动器的性能测试[J].中国光学,2020(2):344-353.
作者姓名:李华东  齐克奇  石强  王少鑫  王智
作者单位:中国科学院长春光学精密机械与物理研究所;中国科学院大学;中国第一汽车股份有限公司新能源开发院
基金项目:中国科学院“空间科学(二期)”战略性先导科技专项(No.XDA15020704)。
摘    要:为保证空间惯性传感器的正常在轨运行,在发射阶段需保证测试质量固定以避免与周围电容极板的接触碰撞;到达预定轨道后再重新捕获并以最小残余线速度将测试质量释放至精确位置,保持自由悬浮状态。测试质量的捕获定位对驱动器提出高精度的要求。本文针对在太空中捕获定位释放测试质量所用的压电直线驱动器进行了设计定制与性能测试。试验结果表明:该定制的压电驱动器最小步长小于1 nm,但步长稳定性误差较大;150 V工作电压条件最大驱动力达72 N;单步行进驱动力稳定;夹持测试质量过程中,驱动力稳定,稳定性偏差为0.16%。满足捕获、定位、释放机构的使用需求。

关 键 词:精密驱动  尺蠖运动  压电驱动器  驱动力  位移分辨率

Performance test of piezoelectric actuators for space inertial sensors
LI Hua-dong,QI Ke-qi,SHI Qiang,WANG Shao-xin,WANG Zhi.Performance test of piezoelectric actuators for space inertial sensors[J].Chinese Optics,2020(2):344-353.
Authors:LI Hua-dong  QI Ke-qi  SHI Qiang  WANG Shao-xin  WANG Zhi
Institution:(Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academic of Sciences, Changchun 130033, China;University of Chinese Academy of Sciences, Beijing 100049, China;New Energy Development Institute of China FAW Group Co., Ltd , Changchun 130011, China)
Abstract:In order to ensure the normal operation of space inertial sensors in orbit,it is necessary to ensure the test mass is fixed during launch to prevent collision with the surrounding capacitor plate.It must grab the test mass after reaching its predetermined orbit and precisely release it in its correct position with minimal residual velocity such that it remains free-floating.In this paper,a piezoelectric linear actuator that is used to grab the test mass is designed,customized and tested for performance.The test results show that the customized piezoelectric actuator can achieve a minimum step size of less than 1 nm,but the step length stability error is large;the maximum driving force at 150 V of input is 72 N;the single stepping drive force is stable;during the process of fixing the test mass,the driving force is stable and the deviation in its stability is 0.16%.These findings meet the needs of the grabbing,positioning,and release mechanisms.
Keywords:precision actuation  inchworm motion  piezoelectric actuator  driving force  displacement resolution
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