| Affiliation: | (1) Department of Nuclear Engineering, Electronic Materials and Processing Research Laboratory, The Pennsylvania State University, 16802 University Park, PA, USA;(2) Department of Physics, Electronic Materials and Processing Research Laboratory, The Pennsylvania State University, 16802 University Park, PA, USA;(3) Department of Physics, Department of Electrical Engineering, Electronic Materials and Processing Research Laboratory, The Pennsylvania State University, 16802 University Park, PA, USA;(4) Present address: National Institute of Standards and Technology, 20899 Gaithersburg, MD, USA;(5) Present address: Applied Materials Corporation, 95054 Santa Clara, CA, USA |
