| 单晶硅表面金字塔生长过程的实验研究 |
| |
| 引用本文： | 田嘉彤,冯仕猛,王坤霞,徐华天,刘峰,黄建华,杨树泉,裴俊.单晶硅表面金字塔生长过程的实验研究[J].光子学报,2011(10):1505-1508. |
| |
| 作者姓名： | 田嘉彤 冯仕猛 王坤霞 徐华天 刘峰 黄建华 杨树泉 裴俊 |
| |
| 作者单位： | 上海交通大学物理系;上海交通大学林洋太阳能光伏研发中心;上海航天技术研究院;上海神舟新能源发展有限公司; |
| |
| 基金项目： | 上海航天基金(No.GC072003)资助 |
| |
| 摘 要： | 在普通碱液中添加一种特殊的添加剂,在不同时间下对单晶硅表面进行刻蚀.用扫描电子显微镜观察样品表面形貌,结果显示:单晶硅片放入加入添加剂2 mL的刻蚀液中,经过10 min刻蚀后晶体表面零星出现大小不一的金字塔,并有大面积的平滑区；刻蚀15 min后金字塔大小趋向一致,平滑区面积缩小；刻蚀20 min硅片表面形成平均尺寸...
|
| 关 键 词： | 单晶硅 微结构 绒面 |
Formation Process of Pyramids on Single Crystal Si Surface |
| |
| TIAN Jia-tong,FENG Shi-meng,WANG Kun-xia,Xu Hua-tian,YANG Shu-quan,LIU feng,HUANG Jian-hua,PEI Jun.Formation Process of Pyramids on Single Crystal Si Surface[J].Acta Photonica Sinica,2011(10):1505-1508. |
| |
| Authors: | TIAN Jia-tong FENG Shi-meng WANG Kun-xia Xu Hua-tian YANG Shu-quan LIU feng HUANG Jian-hua PEI Jun |
| |
| Institution: | TIAN Jia-tong1,FENG Shi-meng1,WANG Kun-xia1,Xu Hua-tian1,YANG Shu-quan2,LIU feng3,HUANG Jian-hua3,PEI Jun4 (1 Physics Department,Shanghai Jiao Tong University,Shanghai 200240,China)(2 LinYang Solar Photovoltaic R&D Center,Shanghai 201109,China)(3 Shanghai Academy of Spaceflight Technology,Shanghai 200082,China) (4 Shanghai Shenzhou New Energy Development Co.,Ltd,Shanghai 201112,China) |
| |
| Abstract: | The texturing process with alkaline solution added a new additive on single-crystal silicon surface was discussed.At different times,alkaline solution added a new additive was used to etch the Si wafers,and samples were scanned by scanning electron microscopy.The results show that there are a few different size pyramids and smooth regions in large-area on the Si surface after etching 10 min;after etching 15 min,the sizes of pyramids become uniform,and the areas of smooth regions will reduce;after etching 20... |
| |
| Keywords: | Single crystal Si Micro-structure Textured structure |
| 本文献已被 CNKI 等数据库收录！ |
|
