移相干涉仪的抗振技术研究进展

在对光学元件面形进行检测和光学系统成像质量的评价中,移相干涉测量技术有着广泛地应用。但是,光学干涉仪的测量精度对环境的要求非常苛刻,环境的振动和空气的扰动会对测量结果产生很大影响。提高移相干涉仪的抗振性很有必要,受到广泛重视。国际上移相干涉仪的抗振技术主要包括主动抗振和被动抗振两方面,两种技术具有各自特点。

Advances in vibration cancellation phase-shifting interferometer

Phase-shifting interferometer has wide applications in many fields including the testing of optical components and optical systems.But the measurement accuracy of phase-shifting interferometry is generally limited by the environment vibration and air turbulence.It's necessary to improve the ability of vibration-insensitive for interferometric testing.The development of two methods for reducing the sensitivity of an optical testing to vibration was discussed: the active vibration-insensitive phase-shifting technology and the passive vibration-insensitive phase-shifting technology.