A microfluidic chip integrated with a microoptical lens fabricated by femtosecond laser micromachining |
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| Authors: | Lingling Qiao Fei He Chen Wang Ya Cheng Koji Sugioka Katsumi Midorikawa |
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| Affiliation: | (1) Interdisciplinary Program, Biomedical Engineering Major, Graduate School, Seoul National University, Seoul, Korea;(2) Department of Biomedical Engineering, College of Medicine and Institute of Medical and Biological Engineering, Medical Research Center, Seoul National University, Seoul, Korea;(3) Department of Chemistry, Seoul National University, Seoul, Korea; |
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| Abstract: | ![]()
We report on the integration of microlens and microfluidic channels in fused silica glass chip using femtosecond laser micromachining. The main process includes three procedures: (1) femtosecond laser scanning for forming a hemispherical surface and a Y-shaped channel in the fused silica glass; (2) chemical etching of the sample for removal of the modified areas; and (3) oxyhydrogen (OH) flame polish for smoothening the surface of the microlens. In addition, we demonstrate that the fabricated microlens exhibits good imaging performance with a 5× magnification, showing great potential in future lab-on-a-chip applications. |
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