Anwendung der Protonen-Rückstreuanalyse zur Bestimmung der Zusammensetzung von AIIIBV-Mischkristallen

Spectra of 1.5 MeV protons elastically scattered from A^IIIB^V mixed crystals are analysed for the determination of the composition of the samples. A brief outline of the method of microanalysis by backscattering spectrometry is given and its application is discussed in detail by two examples. The results of the measurements show good agreement with those obtained through other analytic procedures. The appendix treats the mass and depth resolution of the backscattering technique described before.