| 软X射线掠射筒状反射镜镀镍磷合金的研究 |
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| 引用本文： | 李顺,巩岩,张巍. 软X射线掠射筒状反射镜镀镍磷合金的研究[J]. 光学技术, 2010, 36(5) |
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| 作者姓名： | 李顺 巩岩 张巍 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,长春130033;中国科学院研究生院,北京100039;中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,长春,130033 |
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| 摘 要： | 在软X射线掠射光学系统筒状反射镜的加工过程中,根据对反射镜内表面镍磷合金镀层的质量要求,采用镍盐还原法对筒状微晶玻璃反射镜的内表面进行了活化,并对在含有30g/LNiSO4.6H2O、30g/LNaH2PO2.H2O、25g/LNa(CH3COO).4H2O、18g/LC6H8O7、10mg/L添加剂的镀液中沉积镍磷合金镀层的工艺方法进行了探索。对得到的镍磷合金镀层的结合力、抗腐蚀能力等进行了测试。结果表明,采用此法镀制的镍磷合金镀层结合力达到4B级,耐蚀性好,能够满足光学精密抛光的要求。
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| 关 键 词： | X射线光学 掠入射 镍磷合金 化学镀 |
Research of electroless nickel-phosphorus alloys plating on the soft X-ray grazing incidence tube-shaped reflection mirror |
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| LI Shun,GONG Yan,ZHANG Wei. Research of electroless nickel-phosphorus alloys plating on the soft X-ray grazing incidence tube-shaped reflection mirror[J]. Optical Technique, 2010, 36(5) |
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| Authors: | LI Shun GONG Yan ZHANG Wei |
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| Abstract: | According to the quality requirement of nickel phosphorus alloy coating on soft X-ray grazing incidence tube-shaped mirror's inner surface for the superpolishing,the mirror inner surface is activated with nickel salt reduction.The nickel-phosphorus alloy is plated with a plating solution containing 30g/L NiSO4·6H2O、30g/L NaH2PO2·H2O、25g/L Na(CH3COO)·4H2O、18g/L C6H8O7、5mg/L additives and the plating condition is studied.Finally,nickel-phosphorus alloy coating adhesion and corrosion resistance are tested.The results show that the adhesion of coating is 4B-class,corrosion resistance is good and it can meet the requirement of superpolishing. |
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| Keywords: | X-ray optics grazing incidence nickel-phosphorus alloys electroless plating |
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