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Characterization of a molecular sieve coating using ellipsometric porosimetry
Authors:Eslava Salvador  Baklanov Mikhail R  Kirschhock Christine E A  Iacopi Francesca  Aldea Steliana  Maex Karen  Martens Johan A
Affiliation:IMEC, Kapeldreef 75, 3001 Leuven, Belgium.
Abstract:Ellipsometric porosimetry was used to determine the adsorption isotherms of toluene, methanol, and water on b-oriented Silicalite-1 coatings with a thickness of less than ca. 250 nm and to obtain adsorption kinetics. The adsorption isotherms are of sufficient quality to reveal several aspects of the pore structure such as the adsorbate capacity and the adsorbate/framework affinity. The use of a combination of different molecular probes in ellipsometric porosimetry to elucidate the molecular accessibility of Silicalite-1 pores is demonstrated. It is shown that ellipsometric porosimetry is an appropriate technique for probing the influence of aging of the Silicalite-1 coating and of planarization polishing on the porosity, pore accessibility, and adsorbate/framework affinity.
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