| Nanocavity Shrinkage and Preferential Amorphization during Irradiation in Silicon |
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| 作者姓名： | 朱贤方 王占国 |
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| 作者单位： | [1]LaboratoryofLow-DimensionalNanostructures,DepartmentofPhysicsandNanomaterialsCenter,XiamenUniversity,Xiamen361005 [2]KeyLaboratoryofSemiconductorMaterialsScience,InstituteofSemiconductors,ChineseAcademyofSciences,POBox912,Beijing100083 |
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| 摘 要： | We model the recent experimental results and demonstrate that the internal shrinkage of nanocavities in silicon is intrinsically associated with preferential amorphization as induced by self-ion irradiation. The results reveal novel thermodynamic nonequilibrium properties of such an open-volume nanostructure in condensed matter and also of covalently bound amorphous materials both at nanosize scale and during ultrafast interaction with energetic beam.
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| 关 键 词： | 纳米体积收缩 硅 结构不稳定性 能量束 半导体 |
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