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Non‐Aqueous Routes to Metal Oxide Thin Films by Atomic Layer Deposition |
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| Authors: | Erwan Rauwel Guylhaine Clavel Marc‐Georg Willinger Protima Rauwel Nicola Pinna |
| Abstract: | |
| Keywords: | Atomlagenabscheidung Dü nne Filme Metalloxide Nanostrukturen Sol‐Gel‐Verfahren |