Three-dimensional microfluidic structure embedded in photostructurable glass by femtosecond laser for lab-on-chip applications

A new technology for rapid prototyping of lab-on-chip devices is described. Direct write of a near-infrared femtosecond laser forms three-dimensional (3D) latent images inside photostructurable glass. Modified regions are developed by a post-annealing and then preferentially etched away in dilute hydrofluoric acid solution with an etching selectivity of 40–50 times, resulting in the formation of true 3D hollow microstructures inside the glass. Microfluidic structures with microcells and microchannels embedded in the glass are fabricated by this technique. PACS 42.62.-b; 47.85.Np; 81.05.Kf