磁镜场对射频等离子体中离子能量分布的影响

运用阻碍栅极型能量分析器，在不同磁镜场参数下测量了低温等离子体中离子的能量分布. 结果表明，在放电管中心处离子能量分布，随磁镜场强度的增加而向低能方向偏移，但离子能量分布宽度却没有明显的变化；而随着磁镜比的增加离子能量分布却向高能方向偏移，并且离子能量分布宽度也将变宽.由此可见，磁镜场参数对离子能量分布有很大影响. 关键词： 磁镜场 辉光放电 低温等离子体 离子能量分布

EFFECT OF THE MAGNETIC MIRROR FIELD ON THE ION ENERGY DISTRIBUTIONS IN A RADIO F REQUENCY PLASMA

In this article, using the retarding grid energy analyzer, we have measured the ion energy distributions in a low temperature radio fruquency plasma under the condition of different magnetic mirror parameters. At the centre of discharge cell, the ion energy distributions displace in the direction of low energy with the increase of the magnetic density without evident variation in the ion energy distribution width. With the increase of the magnetic mirror ratio, the ion energy distribution displaces in the direction of high energy, and the width of ion energy distribution became wider. So the magnetic mirror parameters have significant effect on the ion energy distributions.