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Squeeze film damping effect on switching time of a MOEMS optical switch |
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| Authors: | Dongming Sun Wei Dong Caixia Liu Xin Yan |
| Affiliation: | a State Key Laboratory on Integrated Optoelectronics, Jilin University, Jilin Changchun 130023, China |
| Abstract: | |
| Keywords: | Air squeeze film damping MOEMS Reynolds equation dynamic switching time |
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