Electron-optical characteristics of a combined electrostatic lens |
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| Authors: | T. Ya. Fishkova |
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| Affiliation: | 1.Ioffe Physical-Technical Institute,Russian Academy of Sciences,St. Petersburg,Russia |
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| Abstract: | The load characteristics of an electrostatic lens consisting of three coaxial cylinders are calculated. The lens is capable of focusing to one point both paraxial annular beams and annular beams away from the axis. In addition, it increases the intensity of a charged particle beam by roughly an order of magnitude compared with a commonly used single axisymmetric lens. |
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