Institut für Physik, Carl von Ossietzky Universität Oldenburg, PF 2503, D-26111, Oldenburg, Germany
Abstract:
In the field of interferometric metrology the use of high resolution CCD sensors with 1024×1024 to 2048×2048 pixels is predominant. Due to special features (e.g. random pixel access, characteristic curve) CMOS sensors with similar resolution can be an interesting alternative. We compare some characteristics of both sensor types that are important for interferometry and demonstrate two exemplary applications that are only possible by using CMOS cameras.