Deposition of carbon nitride films for space application

Carbon nitride thin films were prepared by electron-beam evaporationassisted with nitrogen ion bombardment and TiN/CN_x composite films were byunbalanced dc magnetron sputtering, respectively. It was found that thesputtered films were better than the evaporated films in hardness andadhesion. The experiments of atomic oxygen action, cold welding, frictionand wearing were emphasized, and the results proved that the sputteredTiN/CN_x composite films were suitable for space application.