Enhanced refractive index well-confined planar and channel waveguides in KTiOPO<Subscript>4</Subscript> produced by MeV C<Superscript>3+</Superscript> ion implantation with low dose期刊界 All Journals 搜尽天下杂志传播学术成果专业期刊搜索期刊信息化学术搜索

Enhanced refractive index well-confined planar and channel waveguides in KTiOPO4 produced by MeV C3+ ion implantation with low dose

Authors:	L.-L. Wang K.-M. Wang Q.-M. Lu H.-J. Ma

Affiliation:	(1) School of Physics, Shandong University, Jinan, 250100, China;(2) Department of Physics, Jining University, Qufu, 273155, Shandong, China;(3) State Key Laboratory of Crystal Materials, Shandong University, Jinan, 250100, China;(4) School of Chemistry and Chemical Engineering, Shandong University, Jinan, 250100, China;(5) The State Key Laboratory of Nuclear Physics and Technology, Peking University, Beijing, 100871, China

Abstract:	We report on the fabrication and characterization of planar and channel waveguides in KTiOPO₄ crystals by 6.0 MeV C³⁺ ion implantation with the dose of 1×10¹⁴ ions/cm². The dark mode spectroscopy of the planar waveguide was measured using a prism coupling arrangement. An increase of the both n _x and n _y refractive indices induced by the annealing after implantation is believed to be responsible for waveguide formation. The bright near-field intensity distribution of the transverse-electric and transverse-magnetic modes in the annealed channel waveguide was collected and studied by end-coupling method.

Keywords:	PACS 42.82Et 61.80Jh
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